Faculty of Engineering | Dept. of Electrical & Computer Engineering

 
Back to NUS homepage
 

HomeAbout UsAnnual ReportsStaffStudentsFacilitiesTechnologyResearch FocusCollaborations

 
 

 
 
MAJOR EQUIPMENT


Scanning Electron Microscopes
Hitachi S2700 LaB6*
Hitachi S3500N VP SEM
*
Hitachi S4100 FESEM
JEOL JSM 5600 SEM
*
Philips XL30 FEG SEM
Philips XL30 FEG ESEM
*

Scanning Probe Microscopes*
Atomic Force Microscope System, Explorer TMX 2100
Environmental Scanning Probe Microscope System, JEOL JSPM 5200
Scanning Probe Microscope System, Digital Instruments DI300 SPM
Semiconductor Device Probe Stations*
Probe Station, Micromanipulator 6150-USMC-V2-1-0
Semiautomatic Probe Station, Cascade Summit S12751
Wentworth PROBE STATION MODEL 0-023-0008

Semiconductor Device Analysers*
Semiconductor Parameter Analyzer, HP4156A
Semiconductor Parameter Analyzer, Agilent 4156C
Simultaneous C-V System, Keithley

Optical Instruments*
Infrared Thermal Camera System, TVS-8502
Near InfraRed (NIR) Photomultiplier Tube (PMT) System
Time-resolved Intensified CCD (ICCD) Detector System
Optical Microscopes

Sample Preparation Equipment
Plastic Mold Decapsulation System, NSC PA103*
Sputter Coater
Tube furnaces, 3-zone, 3"
*
Vacuum Evaporation System, Edwards Auto 306
Wire Bonder

*Note that these equipment are for internal use only 
IN-HOUSE DEVELOPED & COMMERCIALISED EQUIPMENT



Automated Integrated Test System (AITS) For Combined Microscopic And Macroscopic Analysis Of Hot-carrier Stressed Devices.

Cathodoluminescence (CL) System.

Characterization Of Interconnect Electromigration Defects Using Scanning Thermal Microscopy (SThM).


Field-Emission Induced Nanowires Growth and Characterisation Systems.

High Resolution Field-Emission Gun (FEG) Portable Mini SEM.

Scanning Electron Acoustic Microscopy (SEAM) for Subsurface Microelectronic Inspection & Failure Analysis.

 
 

CHARGES

 

Charges for usage of facilities - Equipment Charges

Tracking for usage of facilities - Equipment Usage Form

Application for usage of facilities -
Application Form


 

  



 

 
   
 

NUS: Home | Search | Contacts

 
  © Copyright 2001-05 National University of Singapore. All Rights Reserved.
Terms of Use | Privacy | Non-discrimination
Last modified on 5 June, 2005