Automated Integrated Test System (AITS) For Combined Microscopic And Macroscopic Analysis Of Hot-carrier Stressed Devices
Main Features:
- An integrated system to cater for in-situ device characterization and photon emission measurements.
- Full range of characterization techniques including Flicker Noise Measurement, Drain Current Conductance Method (DCCM), Charge-Pumping Measurement and Charge Profiling,Gated-Diode / GIDL Measurement, Capacitance-Voltage Measurement, Photon Emission Spectroscopy.
- Fully automated experimental process.
Current Focus:
- System is adapted to investigate oxide reliability using electroluminescence (EL) from dielectric film under high field bias.
- Time resolved EL measurement to look at device reliability issues.
AITS system setup:
AITS software:
