Cathodoluminescence (CL) System
Main Features:
- High efficiency collection and transmission optics.
- Capable of panchromatic/monochromatic CL imaging and spectral analysis.
- Spectral analysis from Ultra Violet to Near Infrared region.
Current Focus:
- NIR imaging & spectral analysis.
- Time-resolved & depth-resolution CL.
CL system setup:
Retractable CL detector:
Defects Mapping:
In0.54Ga0.46As
/InP, 0.08% mismatch.
In0.46Ga0.54As
/InP, 0.15% mismatch.
Depth-resolved CL:
At 22 KeV, only few defects
appear in the emission region of the LED.
At 30 KeV, more defects are
clearly seen as the electron beam penetrates deeper.
Temperature dependant CL spectroscopy:
Characterization
of Ge nanocrystals in SiOx matrix - Luminescence property as synthesized by different Rapid Thermal Annealing.
Characteriztoin of defects in SiO2 film-on-Si substrate - Temperature dependence of CL spectra.
