Faculty of Engineering | Dept. of Electrical & Computer Engineering

 
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IN-HOUSE DEVELOPED & COMMERCIALISED EQUIPMENT
High Resolution Field-Emission Gun (FEG) Portable Mini SEM
 



Main Features:

  • Portable on small trolley (L1m x D0.6m x H0.8m).
  • Low voltage SEM (LVSEM) selectable from 500 eV to 6 KeV.
  • Very low beam landing energy down to 10eV.
  • Spatial resolution better than 2nm at beam landing energy of 1KeV.

Download Mini SEM Brochure
 

FEG SEM In Lecture Hall
 



 

FEG SEM Out In The Open Air
 




 

Results
 


Nylon nanofibres of 100 to 200 nm diameter at 6 KeV beam energy.

 

Nylon nanofibres of 100 nm diameter at 50 eV beam landing energy.

 

Conventional FEG SEM with 1 keV landing energy on 500 nm nanospheres.

 

FEG Mini SEM with 1 keV landing energy on 500 nm nanospheres.

 

 

  



 

 
   
 

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Last modified on 5 June, 2005