High Resolution Field-Emission Gun (FEG) Portable Mini SEM


Main Features:
  • Portable on small trolley (L1m x D0.6m x H0.8m).
  • Low voltage SEM (LVSEM) selectable from 500 eV to 6 KeV.
  • Very low beam landing energy down to 10eV.
  • Spatial resolution better than 2nm at beam landing energy of 1KeV.
FEG SEM in the lecture hall:

FEG SEM out in the open air:

Results:


Nylon nanofibres of 100 to 200 nm diameter at 6 KeV beam energy.


Nylon nanofibres of 100 nm diameter at 50 eV beam landing energy.


Conventional FEG SEM with 1 keV landing energy on 500 nm nanospheres.



FEG Mini SEM with 1 keV landing energy on 500 nm nanospheres.

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