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PATENTS GRANTED |
[PG1] JCH Phang, DSH Chan and KL Pey, "High
Efficiency Cathodoluminescence Detector with High Discrimination
Against Backscattered Electrons", U.S. Patent No. 5,264,704 (23
November 1993), Japanese Patent No. 5-288430 (17 November 1993).
[PG2] WK Chim, JCH Phang and DSH Chan, "Method
and Apparatus for Measuring Quantitative Voltage Contrast", U.S.
Patent No. 5,486,769 (23 January 1996) and filed in Singapore on
27 July 1995 (Serial No.: 9500962-7).
[PG3] DSH Chan, KL Pey and JCH Phang, "Double
Reflection Cathodoluminescence Detector with Extremely High
Discrimination Against Backscattered Electrons", U.S. Patent No.
5,468,967 (21 November 1995).
[PG4] JCH Phang, WK Chim, DSH Chan and YY Liu,
"A retractable cathodoluminescence detector with high
ellipticity and high backscattered electron rejection
performance for large area specimens", U.S. Patent No. 5,569,920
(29 October 1996).
[PG5] WK Chim, DSH Chan, JCH Phang, JM Tao and
YY Liu, "An Integrated Emission Microscope for Panchromatic
Imaging, Continuous Wavelength Spectroscopy and Selective Area
Spectroscopy", U.S. Patent No. 5,724,131 (3 March 1998) and
Singapore Patent No. 52148 (22 August 2000).
[PG6] A Khursheed, JCH Phang and JTL Thong, "A
portable high resolution scanning electron microscope column
design using permanent magnet lenses", U.S. Patent No. 6,057,553
(2 May 2000) and patent filed in Singapore on 27 September 1997
(Serial No.: 9703597-6)
[PG7] WK Wong, JTL Thong and JCH Phang,
"Selective Deposition of a Particle Beam Based on Charging
Characteristics of a Sample", U.S. Patent No. 6,608,305 (19
August 2003) and filed in Singapore on 29 February 2000 (Serial
No.:200001028-0).
[PG8] Chin JM, Kolachina S, Phang JCH, Chan
DSH, “Pulsed Single Contact Optical Beam Induced Current
Analysis of Integrated Circuits”, US Patent 6,556,029 (29 Apr
2003)
[PG9] YY Liu, DSH Chan and JCH
Phang,“Rotational Stage For High Speed, Large Area Scanning In
Focused Beam Systems”, U.S. Patent No. 6,777,688 B2 (17 August
2004).
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PATENTS
PENDING |
[PP1] A Khursheed, “A Lens for Scanning Electron
Microscope”, filed in Singapore on 5 April 2000 (Serial No.:
200002421-6).
[PP2] JCH Phang et al., “Pulsed Single Contact Beam
Induced Current Analysis in Integrated Circuit”, filed in Singapore on
12 April 2000 (Serial No.:200002028-9) and in the U.S. on 1 August 2000
(Serial No.:09/630,252).
[PP3] A Khursheed and JTL Thong, “An add-on
Transmission Attachment for the SEM”, US provisional application filed
on 3 July 2002 (Serial No.: 60/393,132).
[PP4] A Khursheed, “Low Voltage Time of Flight
Electron Emission Microscope", US provisional application filed on 3
July 2002 (Serial No.: 60/393,133).
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SPIN-OFF COMPANIES |
Scanning Beam Technology (SBT) Pte Ltd
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COMMERCIALISED TECHNOLOGIES |
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Technology: |
Scanning Electron Microscope Image Collection and
Processing System (SEMICAPS) |
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Status: |
Under License since 1989 |
Licensee:
(Territory) |
Image Trasnforms Pte Ltd
-
http://www.semicaps.com
(worldwide) |
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Inventors |
JCH Phang, DSH Chan, TS Low |
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Description |
The Scanning Electron Microscope Image Collection And
Processing System (SEMICAPS) was designed to control,
capture, store and process images from scanning electron
microscopes. It will enhance the performance, ease of
operation and throughput of scanning electron microscopes.
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Technology: |
Cathodoluminscence (CL) System |
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Status: |
Under License since 1995 |
Licensee:
(Territory) |
Image Trasnforms Pte Ltd
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http://www.semicaps.com
(worldwide) |
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Inventors |
JCH Phang, DSH Chan, WK Chim, YY Liu |
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Description |
The cathodoluminescence detection system capable of
performing monochromatic and panchromatic imaging and
spectral analysis of luminescent materials either on a
conventional or field emission scanning electron microscope. |
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Technology: |
Spectroscopic Photon Emission Microscope System (SPEMS) |
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Status: |
Under License since 1995 |
Licensee:
(Territory) |
Image Trasnforms Pte Ltd
-
http://www.semicaps.com
(worldwide) |
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Inventors |
WK Chim, DSH Chan, JCH Phang, JM Tao, YY Liu |
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Description |
The Spectroscopic Photon Emission Microscope System (SPEMS)
is an emission microscope with capabilities for integrated
panchromatic imaging and continuous wavelength
spectroscopy. This tool is used for emission localisation
and characterisation of failure mechanisms using "defect
finger-printing", that is, identification of failure
mechanisms from the spectral information. |
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Technology: |
Scanning Electron Acoustic Microscopy (SEAM) |
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Status: |
Under License since 1999 |
Licensee:
(Territory) |
Scanning Beam Technology (SBT) Pte Ltd
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Inventors |
JTL Thong, WK Wong, JCH Phang, QR Yin |
Description
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SEAM is a novel technique that has been developed for the
Scanning Electron Microscope (SEM) which extends the
capabilities of the SEM to deep, sub-surface analysis
presently not detectable in the SEM. SEAM utilises the
detection of thermal-acoustically generated signals which
contains information regarding the physical composition,
electrical and thermal properties of the material.
Application for SEAM include sub-surface imaging and
analysis, electro/magnetic domain mapping, mechanical
stress/strain profiling, grain analysis, thin film characterisation and thermal-elastic material analysis.
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Technology: |
High Resolution Portable
Scanning Electron Microscopes |
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Status: |
Under License since 2005 |
Licensee:
(Territory) |
Mini Electron Beam Instruments (MEBI) Pte
Ltd -
http://sg.geocities.com/nkmebi/
(Worldwide) |
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Inventors |
A Khursheed |
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Description |
Mini Electron Beam Instruments (MEBI) announces its line of
low cost portable Scanning Electron Microscopes (SEMs).
These SEMs are amongst the world's first truly commercial
portable SEMs. The complete SEM system, including column,
gun, pump, display, control and high tension electronics, is
incorporated on to a small trolley that can fit into small
elevators, wheeled through narrow doorways, or rolled on to
the back of a mini-van. Moreover, each SEM system is
portable, since its column, electronics box, and vacuum
system can all be individually lifted and carried by hand.
MEBI SEMs can be taken on field trips or moved from floor to
floor in large buildings. This development is likely to
create a new market for SEMs, which may include schools,
hospitals, and even individual amateur researchers.
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